The program is a combination of plenary, parallel and poster sessions.
The general structure of the MNE 2006 program will be as follows: the conference will begin with the welcome reception and the opening of the commercial exhibition Sunday 17 of September. The technical program will begin Monday 18 and will finalize Wednesday 20 in the evening. The posters’ session has a dedicated session Monday in the evening. The posters will remain exposed the three days of the conference.
| Monday, September 18th |
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| Session 1A |
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Microsystems and their fabrication 1 |
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| Auditorium |
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Chair: Juergen Brugger, Stella W. Pang |
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| 11:30-12:00 |
A. Boisen |
Cantilever based sensors |
1A-1 |
INVITED |
| 12:00-12:20 |
Flavio Pardo |
Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast Spatial Light Modulators. |
1A-2 |
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| 12:20-12:40 |
Edouard Duriau |
Fabrication of Cantilevers and Double AFM Tips for the NanoProfiler |
1A-3 |
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| 12:40-13:00 |
Manuel Aschwanden |
Tunable diffraction grating based on electroactive polymers |
1A-4 |
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| Session 1B |
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Nanodevices 1 |
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| CIC1 Room |
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Chair: John R.A Cleaver, Michael Stuke |
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| 11:30-11:50 |
Tatiana Borzenko |
Micro-patterned RTDs: fabrication details and device performance |
1B-1 |
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| 11:50-12:10 |
Vito Errico |
Quantum Dot Nano-Cavity Emission Tuned by a Circular Photonic Crystal Lattice |
1B-2 |
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| 12:10-12:30 |
Vincent Reboud |
Spontaneous emission of nanocrystals in nanoimprinted photonic structures |
1B-3 |
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| 12:30-12:50 |
Laura Heyderman |
Permalloy thin films exchange-coupled to arrays of stencelled cobalt islands |
1B-4 |
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| Session 1C |
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Process Diagnostics and Control |
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| A2+A3 Room |
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Chairs: Albert Cornet, Steven Steen |
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| 11:30-11:50 |
Atsuko Yamaguchi |
Single-shot Method for Bias-free LER/LWR Evaluation with Little Damage |
1C-1 |
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| 11:50-12:10 |
Dominik Ziegler |
AFM Topography with Online Surface Potential Compensation |
1C-2 |
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| 12:10-12:40 |
A. Walton |
Test structures for characterising microelectronic and MEMS related processes |
1C-3 |
INVITED |
| 12:40-13:00 |
Nicola Naujoks |
Measuring electrical sample properties by multifrequency AFM |
1C-4 |
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| Session 2A |
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Nanoscale Engineering and Fabrication 1 |
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| Auditorium |
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Chair: Jacques Gierak, José I. Martín |
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| 15:00-15:30 |
Ran Ji |
All roads lead to Rome: Two methods for the fabrication of perfectly ordered circular or elliptical nanoring arrays based on interference lithography |
2A-1 |
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| 15:30-15:50 |
Dawn Bonnell |
Ferroelectric Nanolithography: Assembling Multi Component Nanostructures into Functional Devices |
2A-2 |
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| 15:50-16:10 |
Morten Gersborg-Hansen |
Polymer-based nano-fluidic dye laser |
2A-3 |
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| 16:10-16:30 |
Thomas Sünner |
Fine-tuning of GaAs photonic crystal cavities by digital etching |
2A-4 |
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| 16:30-16:50 |
Cristian Giordano |
Nanocrystals cylindrical microcavities exploiting thin-walled InGaAs/GaAs microtubes |
2A-5 |
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| 16:50-17:10 |
A. Fujimoto |
Nano-structured surface fabrication for higher luminiscent LED by self-assembled block copolymer |
2A-6 |
INVITED |
| 17:10-17:30 |
Steven Steen |
Wafer Scale 3D Integration: Overlay as the key to drive potential |
2A-7 |
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| Session 2B |
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Micro- and Nano-systems for Biology 1 |
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| CIC1 Room |
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Chairs: Yong Chen, César Fernández |
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| 15:00-15:30 |
A. Offenhaeuser |
DNA, proteins, and neurons coupled to electronic devices |
2B-1 |
INVITED |
| 15:30-15:50 |
Ulrike Lehmann |
On-chip antibody handling and detection in a magnetic droplet manipulation system |
2B-2 |
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| 15:50-16:10 |
Daisuke Saya |
Collective fabrication of in-plane silicon nanotip for parallel femtoliter droplet deposition |
2B-3 |
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| 16:10-16:30 |
Alicia Johansson |
Surface stress measurement in liquid using SU-8 cantilevers with integrated readout |
2B-4 |
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| 16:30-16:50 |
Fu-Hsiang Ko |
Self-Aligned Gold-Silicide Nanowires for Protein Sensing |
2B-5 |
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| 16:50-17:10 |
Jérôme Polesel Maris |
Piezoresistive Cantilever Array for Applications in Life Sciences |
2B-6 |
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| Session 2C |
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Photon Lithography |
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| A2+A3 Room |
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Chairs: Frank Michael Kamm |
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| 15:00-15:20 |
Takako Yamaguchi |
Fabrication of hp 32 nm Resist Patterns using Near-field Lithography |
2C-1 |
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| 15:20-15:40 |
Andy Ma |
Progress Towards Defect-free Masks for Extreme Ultraviolet Lithography |
2C-2 |
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| 15:40-16:00 |
Artak Isoyan |
EUV Holographic Lithography: First Results |
2C-3 |
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| 16:00-16:20 |
Abani Biswas |
A 45 Degree Dual Dipole Decomposition Scheme to Improve Image Fidelity |
2C-4 |
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| 16:20-16:40 |
Yasin Ekinci |
20 nm Line/Space Patterns in HSQ Fabricated by EUV Interference Lithography |
2C-5 |
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| 16:40-17:00 |
Yasuhisa Inao |
Near-Field Lithography as prototype nano-fabrication tool |
2C-6 |
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| Tuesday, September 19th |
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| Session 3A |
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RF-MEMS. NEMS |
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| Auditorium |
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Chairs: Nuria Barniol, Rainer Minixhofer |
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| 11:00-11:30 |
M. Tanaka |
Important features of MEMS devices for practical applications |
3A-1 |
INVITED |
| 11:30-11:50 |
Stella Chang |
Fabrication of a Tunable RF MEMS Inductor on Silicon in a sub-150°C Process |
3A-2 |
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| 11:50-12:10 |
Kiyotaka YAMASHITA |
Some dependencies of field-emission current for RF-MEMS applications |
3A-3 |
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| 12:10-12:30 |
Jordi Teva |
Fabrication of monolithic CMOS-MEMS devices using a standard 0.35um commercial technology for sensor and RF applications |
3A-4 |
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| 12:30-12:50 |
Alvaro San Paulo |
Si nanowire NEMS: Fabrication and mechanical characterization of suspended single nanowire and nanowire array structures |
3A-5 |
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| 12:50-13:10 |
Lauge Gammelgaard |
Wafer Scale Fabrication of Suspended TiW Nanowires |
3A-6 |
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| Session 3B |
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Electron and Ion Beam Lithography 1 |
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| CIC1 Room |
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Chairs: Wilhelm H. Bruenger, Alexei Bogdanov |
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| 11:00-11:30 |
E. Kolodney |
C60-ion source: novel surface processes and interactions |
3B-1 |
INVITED |
| 11:30-11:50 |
Peter Hahmann |
Resolution Enhancement for Variable-Shaped Beam Writers |
3B-2 |
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| 11:50-12:20 |
O. Wilhelmi |
Nanofabrication and rapid prototyping with DualBeam instruments |
3B-3 |
INVITED |
| 12:20-12:40 |
Jacques Gierak |
Sub-5 nm FIB direct patterning of nanopores |
3B-4 |
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| 12:40-13:00 |
Richard Langford |
Reducing the Resistivity of Electron and Ion Beam Assisted Deposited Platinum |
3B-5 |
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| Session 3C |
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Resists and Resist Processing |
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| A2+A3 Room |
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Chair: Emile van der Drift, Alex Robinson |
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| 11:00-11:20 |
Thorsten Wahlbrink |
Fabrication of high aspect-ratio HSQ nano-structures through supercritical drying |
3C-1 |
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| 11:20-11:40 |
Vahid Fakhfouri |
High-aspect ratio three-dimensional photoresin-based microstructures doped with luminescent nanocrystals |
3C-2 |
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| 11:40-12:00 |
Hiroaki Oizumi |
Patterning capability of new molecular resist in EUV lithography |
3C-3 |
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| 12:00-12:20 |
Gaugiran Stephanie |
Leaching mechanisms in immersion lithography with and without top-coat |
3C-4 |
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| 12:20-12:40 |
Morten Gersborg-Hansen |
Combined electron beam lithography and UV lithography in SU-8 |
3C-5 |
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| 12:40-13:10 |
M. Vogler |
Taylor-made polymers and resists - a key to the implementation of nanoimprint lithography |
3C-6 |
INVITED |
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| Session 4A |
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Micro- and Nano-systems for Biology 2 |
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| Auditorium |
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Chairs: Evangelo Gogolides, Alejandro Pérez-Rodríguez |
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| 15:45-16:05 |
yan jun liu |
Integrated Magnetic Micro-Columns for Cancer Cell Capture and Sorting |
4A-1 |
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| 16:05-16:25 |
James Muys |
Bioimprint: Cellular Replication for Nanoscale Imaging |
4A-2 |
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| 16:25-16:45 |
Yong Chen |
Patterning of hydrophilic micro arrays with super-hydrophobic surrounding zones |
4A-3 |
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| 16:45-17:05 |
Pinelopi Bayiati |
Biofluid transport on hydrophobic plasma deposited fluorocarbon films |
4A-4 |
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| Session 4B |
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Nanoimprint Lithography 1 |
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| CIC1 Room |
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Chairs:Hella C. Scheer, Helmut Schift |
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| 15:45-16:05 |
Santos Merino |
A new way of manufacturing high resolution optical encoders by nanoimprint lithography |
4B-1 |
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| 16:05-16:25 |
Douglas Resnick |
Step and Flash Imprint Lithography Templates for the 32 nm Node and Beyond |
4B-2 |
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| 16:25-16:45 |
Nicolas Bogdanski |
Structure size dependent recovery of thin polystyrene layersin thermal imprint lithography |
4B-3 |
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| 16:45-17:05 |
Stijn Scheerlinck |
UV-NIL with a DUV-Fabricated Silicon Template as a Flexible Tool for Nanopatterning |
4B-4 |
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| Session 4C |
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Pattern Transfer |
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| A2+A3 Room |
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Chairs: Fu-Hsiang Ko, Philippe Godignon |
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| 15:45-16:05 |
Thomas TILLOCHER |
Silicon cryo-etching of deep holes |
4C-1 |
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| 16:05-16:25 |
Xu Li |
Dry etching of a device quality high-k GaxGdyOz gate oxide in CH4/H2-O2 chemistry for the fabrication of III-V MOSFETs |
4C-2 |
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| 16:25-16:45 |
Remi DUSSART |
The passivation layer formation in the cryo-etching plasma process |
4C-3 |
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| 16:45-17:05 |
Georgios Boulousis |
Mechanism of surface roughness formation and evolution during Si etching |
4C-4 |
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| Session 5A |
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Nanoscale Engineering and Fabrication 2 |
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| Auditorium |
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Chair: Andris Šternberg, Gottfried Strasser |
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| 17:30-17:50 |
Charan Srinivasan |
Fabrication of Nanostructures using Molecular Ruler Resist |
5A-1 |
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| 17:50-18:10 |
Kohichi Tanaka |
Detection of magnetic field for measuring current distribution in poly-Si layer |
5A-2 |
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| 18:10-18:30 |
Vinzenz Friedli |
Mass sensor with femtogram resolution for in-situ control of focused electron beam induced deposition |
5A-3 |
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| 18:30-18:50 |
Maria Villarroya |
Dynamics of attoliter glycerine drops evaporation using a CMOS-MEMS mass sensor |
5A-4 |
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| Session 5B |
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Micro- and Nano-systems for Biology 3 |
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| CIC1 Room |
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Chair: Andreas Stemmer, Laura Lechuga |
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| 17:30-18:00 |
U. Staufer |
Micro- and Nanosystems for Biology and Medicine |
5B-1 |
INVITED |
| 18:00-18:20 |
Makoto Fujimaki |
Nanoscale pore fabrication for high sensitivity waveguide-mode biosensors |
5B-2 |
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| 18:20-18:40 |
Troels Balmer Christensen |
Sample preparation by cell guiding using negative dielectrophoresis |
5B-3 |
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| 18:40-19:00 |
Michal Pribyl |
Quantification of human IgG in a multichannel microfluidic chip |
5B-4 |
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| Session 5C |
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Microsystems and their Fabrication 2 |
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| A2+A3 Room |
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Chair: Rebecca Cheung, Philipp M Nellen |
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| 17:30-17:50 |
Anthony Nichol |
Two-Step Magnetic Self-Alignment of Folded Membranes for 3D Nanomanufacturing |
5C-1 |
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| 17:50-18:10 |
Christian David |
Fabrication of diffraction gratings for hard x-ray phase contrast imaging |
5C-2 |
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| 18:10-18:30 |
C. Cané |
Micro and Nanotechnologies for Food Safety and Quality Applications |
5C-3 |
INVITED |
| 18:30-19:00 |
Aitor Ezkerra |
Fabrication of SU8 free standing structures embedded in microchannels for microfluidic control |
5C-4 |
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| Wednesday, September 20th |
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| Session 6A |
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Nanoscale Engineering and Fabrication 3 |
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| Auditorium |
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Chair: Laura Heyderman, Vincent Derycke |
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| 11:00-11:20 |
Christophe Yamahata |
Towards wet anisotropic silicon etching of perfect pyramidal pits |
6A-1 |
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| 11:20-11:40 |
Livia Seemann |
Nano-Xerography applied to nanoparticles and carbon nanotubes |
6A-2 |
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| 11:40-12:00 |
Rudeesun Songmuang |
From rolled-up of Si microtubes to SiOx/Si optical ring resonators |
6A-3 |
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| 12:00-12:20 |
Markus Fischer |
Electron beam-induced direct-deposition of magnetic nanostructures |
6A-4 |
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| 12:20-12:40 |
James Liddle |
Control of Lamellar Diblock Coploymers Through Patterned Surface Chemistry |
6A-5 |
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| 12:40-13:00 |
Ramona Mateiu |
Batch fabrication of nanotubes suspended between microelectrodes |
6A-6 |
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| Session 6B |
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Nanoimprint Lithography 2 |
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| CIC1 Room |
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Chairs: Santos Merino, Douglas Resnick |
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| 11:00-11:30 |
L. Montelius |
Nanoimprint lithography for nanomechanics, electronics and life science applications |
6B-1 |
INVITED |
| 11:30-11:50 |
Yong Chen |
Micro-aspiration assisted lithography |
6B-2 |
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| 11:50-12:10 |
Sergey Zaitsev |
Coarse-grain method for modelling of stamp deformation in nanoimprint |
6B-3 |
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| 12:10-12:30 |
Yifang Chen |
High density pattern fabricated in SU-8 by Nanoimprint and UV curing |
6B-4 |
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| 12:30-12:50 |
Tapio Mäkelä |
Roll to roll nanoimprinting on inherently conducting polyaniline |
6B-5 |
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| 12:50-13:10 |
Javier G. Fernandez |
Forced Soft Lithography (FSL) and its Application to the Fabrication of Structured Chitosan Biopolymer for Cell-Surface Interaction Experiments |
6B-6 |
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| Session 6C |
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Maskless Lithography/Mask Technology |
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| A2+A3 Room |
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Chair: Serge Tedesco, Hiroyuki Ito |
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| 11:00-11:20 |
Jingquan Lin |
Actinic EUVL Mask Blank defects inspection by EUV photoemission electron microscope |
6C-1 |
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| 11:20-11:40 |
Hiroo Kinoshita |
Observation of the internal defects of multilayer films |
6C-2 |
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| 11:40-12:10 |
J. Brugger |
Nanostencil lithography |
6C-3 |
INVITED |
| 12:10-12:30 |
Kun Liu |
Electron beam nanofabrication beyond 65nm node for mask repair and circuit edit |
6C-4 |
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| 12:30-12:50 |
Frank Thrum |
CD control of direct versus complementary exposure for shaped beam writers and its correlation to the registration error |
6C-5 |
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| 12:50-13:10 |
Jan Pieter Kuijten |
Process Impact from Mask Grid Variation |
6C-6 |
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| Session 7A |
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Microsystems and their fabrication 3 |
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| Auditorium |
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Chair: Regina Luttge, Zachary Davis |
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| 15:00-15:20 |
Thomas Hantschel |
Conductive diamond probes with electroplated holder chips |
7A-1 |
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| 15:20-15:40 |
Yong Chen |
Characterization of Microfluidic Fuel Cell Based on Multiple Laminar Flow |
7A-2 |
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| 15:40-16:00 |
Daniel Witte |
Lamellar Crystallization of Silicon for 3-dimensional Integration |
7A-3 |
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| 16:00-16:20 |
Anders Greve |
Towards on-chip explosive detection using silicon cantilevers |
7A-4 |
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| 16:20-16:40 |
ling Wang |
Micro-Nozzle Fabrication and Assembly for Nano-Emitter Electrospray |
7A-5 |
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| 16:40-17:00 |
Stefano Sardo |
Fabrication of Apodized Bragg Gratings Structure for Tunable Filter |
7A-6 |
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| Session 7B |
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Nanodevices 2 |
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| CIC1 Room |
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Chair: Jose Maria De Teresa, Adrian Bachtold |
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| 15:00-15:30 |
Robert Hartman |
Future of nanoelectronics in Europe |
7B-1 |
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| 15:30-15:50 |
Vincent Derycke |
Carbon nanotubes self-assembly for electronic applications |
7B-2 |
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| 15:50-16:10 |
Tarek Lutz |
Fabrication of a Nano-Scale NAND memory array based on a SONOS Fin-FET cell using e-beam lithography and Hydrogen-Silsesquioxane resist |
7B-3 |
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| 16:10-16:30 |
Filippo Romanato |
Desing and development of hybrid sol-gel films for direct patterning. |
7B-4 |
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| 16:30-16:50 |
Antonio Qualtieri |
Photonic crystal based organic random lasers |
7B-5 |
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| 16:50-17:10 |
Giuseppe Maruccio |
Negative differential resistance and electron pathway in molecular tunnel-junction based on individual Azurins |
7B-6 |
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| Session 7C |
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Electron and Ion Beam Lithography 2 |
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| A2+A3 Room |
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Chair: Ivan Kostic, Sergey Zaitsev |
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| 15:00-15:30 |
A. Romano |
Focused ion beam (FIB): a prototyping tool for micro and nanofabrication |
7C-1 |
INVITED |
| 15:30-15:50 |
Wolfgang Lang |
Ion-beam modification of cuprate superconductors on a sub-µm scale |
7C-2 |
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| 15:50-16:10 |
Stephen Thoms |
Tilt-corrected stitching for electron beam lithography |
7C-3 |
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| 16:10-16:30 |
Yogesh Karade |
Controlled sub-Micrometer Surface Morphologies by Thermal Relaxation of Locally Crosslinked Stretched Polymers Samples |
7C-4 |
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| 16:30-16:50 |
Liam O'Faolain |
The effects of Lithography on Losses in Photonic Crystals |
7C-5 |
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| 16:50-17:10 |
Sumio Hosaka |
Nano-dot arrays with a bit pitch and a track pitch of 25 nm |
7C-6 |
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