Photon Lithography
DUV, 193nm, 193nm immersion, 157nm, 157nm immersion, EUV, sources, optics, systems, alignment, optical proximity correction, lithography modelling, novel techniques.

Electron and Ion Beam Lithography
Sources, optics, systems, alignment, e-beam proximity correction, ebeam mask writer, ion beam surface interactions, gas assisted ion beam etching and deposition.

Nanoimprint Lithography & Technology
Systems, alignment, nano-imprint methods, results and applications, stamps fabrication.

Mask Technology
Masks for photon-based and charged-particle lithography, accuracy, line width control, contamination, damage, inspection and repair.

Mask-Less Lithography
Photon, charged-particle, proximity probe based techniques. Sources, optics, systems, alignment, modelling, throughput.

Resists and Resist Processing
Materials, thin films, multilayer and inorganic resists, antireflective coatings, surface imaging, conductive films, chemical amplifications, wet and dry processing, characterization, modelling of exposure and development.

Pattern Transfer
Dry etching, beam-assisted etching and deposition, etch damage, lift-off, plating, implantation, sputtering, sources and reactors, pattern transfer modelling.

Microsystems and their fabrication
Surface and bulk micro-machining, 3D structures, new materials, sensors and actuators, micro (opto) electro-mechanical devices - M(O)EMS, microfluidics.

RF-MEMS/NEMS
Micro- and nano-electromechanical passive devices, RF micro- and nano-mechanical resonators, M/NEMS-based RF systems. integrated RF-MEMS/NEMS.

Nanoscale Engineering & Fabrication
Novel fabrication methods, limits of miniaturization, self-assembling and self-organizing systems, scanning probe techniques, nanomechanics, nanofluidics, measurements / characterization, modelling at the nanoscale.

Nanodevices
Nanoelectronics, nanomechanical devices, nanooptics / nanophotonics, nanomagnetics, data storage, carbon nanotube devices, molecular devices, characterization and applications.

Micro- & nano-systems for biology
Bio-MEMS, Lab-on-a-chip, bio(medical)devices, micro total-analysis systems, micro- and nanofluidic biodevices.

Process Diagnostics & Control
Inspection, testing, modification, metrology and in-situ measurements of processes, devices and circuits